1995 AMAT P-5000 Mark II DLH SACVD

SACVD (Chemical Vapor Deposition)

Deposition Equipment

Date of Manufacture: 1995-05-25

Currently Configured for: 200mm

Current Equipment Status: Available

Available date: Currently Available

Software: b6.02

MF: P5000 Mark II

Qty 4 - DLH SACVD: TEOS Deposition

Chuck: Anodized Aluminum

MFCs: 24 Horiba Z500 Digital MFCs

Robot: ROBOT ASSY 8 IN AMAT 5000

Dry Pumps:

4 IXH620, 1 Edwards IXL120

Chillers:

AMAT Heatex 1

Edwards Atlas Abatement

Upgrades:

PLIS, V440 SBC

Power glitch protection

Known Missing Parts:

Heater jackets, AI board Qty 1 ; Tool is not complete