1995 AMAT P-5000 Mark II DLH SACVD

SACVD (Chemical Vapor Deposition)

Deposition Equipment

Currently Configured for: 200mm

Current Equipment Status: Available

Available date: Currently Available

Software: b6.02

MF: P5000 Mark II

Qty 4 - DLH SACVD: TEOS Deposition

Chuck: Anodized Aluminum

Ozonators (4 Astex) with In usa ozone monitor.

Shumacher TEOS cabinet

MFCs: 28 Horiba Z500 Digital MFCs

Robot: ROBOT ASSY 8 IN AMAT 5000

Dry Pumps:

EDWARDS iqdp80/qmb250 STACK Qty 4. Edwards IQDP80 Qty 1

Chillers:

AMAT Heatex 1, Neslab HX300

Upgrades:

PLIS,Brooks Digital Baratron Qty 8, V440 SBC