AMAT P-5000 Mark II MxP+ Dielectric

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Currently Configured for: 200mm

Current Equipment Status: Available

Available date: Currently Available

Software: 4.8_26

MF: P5000 Mark II

Qty 1 - MxP WEB

Qty 3 - MxP+ Dielectric

ESC: Polymide

Gases Used: N2, CF4, SF6, HBR, CL2, CHF3

MFCs: 19 DIgital MFC's Unit or Horiba

Robot: ROBOT ASSY 8 IN AMAT 5000

Dry Pumps:

1-BA100, 3 DS80/250, 1-IQDP80/WSU151

Chillers:

2 Neslab 150, 1- Hx AMAT 0