AMAT P-5000 Mark II MxP+ Dielectric

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Currently Configured for: 200mm

Current Equipment Status: Available

Available date: Currently Available

Software: 4.8_26

MF: P5000 Mark II

Qty 2 - MxP WEB

ESC: Polymide

Qty 2 - MxP+ Dielectric

ESC: Ceramic

Gases Used: SF6, CL2, CF4, HBR, HE/O2, CHF3, O2, AR, CH3F

MFCs: 20 DIgital MFC's Unit or Horiba

Robot: ROBOT ASSY 8 IN AMAT 5000

Dry Pumps:

1-BA100, 4-DS80/250

Chillers:

3 Neslab 150, 1-AMAT-0