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Varian E 500 EHP Medium Current Implanter

Varian E 500 EHP Medium Current Implanter

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Description

- Includes thin wafer handling kit

- 6"

- Can be converted to 8"

-250KV max beam energy

- 50/60 Hz

- 3 Phase

- 5 Wire

- 208V


Specifications

ManufacturerVarian
ModelE 500 EHP Medium Current Implanter
ConditionUsed
Stock NumberBM5139