2003 AMAT 200mm Centura II

Centura MF II

Software: Vita Controller

Indexer: Narrow Body / Tilt out mit Dummy Wafer Storage

Robot: HP+

Chamber:

A -> DPS+

B -> DPS+

C -> IPS

D -> ASP+

E -> Single Cooldown

F -> Orienter

Power Requirements 208 V   180.0 A   50/60 Hz   3 Phase

Year of Manufacture 2003

Condition Good