OFENV01D

Furnace with 2 Tubes

1x Reactor Dot. Poly Low Pressure

1x Reactor Atmosphere WET-OXID

Wafer Size Range Minimum 150 mm Maximum 200 mm Set Size 200 mm

Number of Cassette Platforms 24

Robot Manufacturer/Model Genmark

Controller Manufacturer/Model Genmark

Interface RS 232

Process Gases SiH4; Ph3; O2; H2; N2;HCl

Other Information All components existing

WIP serial ID 240305

Reactor serial ID 240320; 240350

CE Marked YES

Year of Manufacture 1999

Condition Very Good

1999 ASM Advance 400