2008 ASM Advance 400

ASM Furnace Vertical - Advance 400

2 Reactor atmospheric

Robot defect and need service 

Wafer Size Range   Minimum 150 mm  Maximum 200 mm  Set Size 150 mm

Number of Cassette Platforms 24

Robot Manufacturer/Model Genmark

Controller Manufacturer/Model Genmark

Interface RS 232Process Gases O2; N2;

Other Information Genmark Roboter defect;

Fast Ramp

CE Marked YES

Year of Manufacture 2008

Condition Very Good