1999 ASM Advance 400

ASM Furnace Vertical - Advance 400

2 Reactors atmospheric

Wafer Size Range   Minimum 150 mm  Maximum 200 mm  Set Size 200 mm

Robot Manufacturer/Model Genmark

Controller Manufacturer/Model Genmark

Interface RS 232

Process Gases N2; O2

Accessories All components in package existing and in package included

Year of Manufacture 1999

Condition Very Good