2000 ASM Advance 400

ASM Furnace Vertical - Advance 400

2x Reactor Dot. Poly Low Pressure

Wafer Size Range   Minimum 150 mm  Maximum 200 mm  Set Size 200 mm

Robot Manufacturer/Model Genmark

Controller Manufacturer/Model Genmark

Interface RS 232

Process Gases SiH4; Ph3; O2; N2;

Accessories All components existing and included

CE Marked YES

Year of Manufacture 2000

Condition Very Good