AMAT Endura 5500 Aluminum Interconnect

PVD (Physical Vapor Deposition)

Deposition Equipment

Currently Configured for: 200mm

Software: v8.89

Mainframe: Endura 5500

Robot: HP with Fabworx Blade, Wrist, and Arms

Chambers:

Qty 1 - Ti

Pedestal - A4 Clamped

Qty 1 - AlCuW

Pedestal - HTHU Clamped

Qty 1 - AlCuW

Pedestal - ESC

Qty 1 - TiN

Pedestal - A101

Qty 2 - RF PCII

Pedestal - Quartz

Auxiliaries:

Qty 1 - Neslab 3 HX

Qty 2 - CTI 9600 Cryo Compressor

Edwards IQDP40/QMB250 Rough Pump

MFCs:

Unit 1660 - 3

Horiba Z500 - 3

Stec 440 - 6