2000 Eaton Nova Axcelis NV GSD 200 EE

It’s still installed but no longer under power.

It was in Working Condition when decommissioned.

Wafer : 8 Inches.

Vintage : 2000.

It's completer with HDD and Software included.

- 3 Phase

- 50 Hz

- 208 Vac

- Cryo-Pumps: CTI/Edwards Onboard; OB-8 + OB-10 fully refurbished

- Cryo-Compressor: CTI 9650 Low-Voltage

- Turbo-Pumps: Seiko STP A2203 fully refurbished

- Disk-Type: Si-coated Disk fully refurbished

- Wafer-Cooling: no Disk-Chiller included

- Gasbox: 5-String, 4x Toxic-Low-Pressure

- String1: PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3

- String2: BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3

- String3: AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3

- String4: SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3

- String5: Argon Carriergas; MFC Brooks GF120 10sccm-N2

- Disk Drive: Direct Drive

- Dose Type: Regular

- Source Type: ELS4 IHC-Source without Vaporizer

- High voltage-Transformer: dry

- Light-Tower: red/yellow/green; no buzzer

- Main-Workstation: SUN Solaris AXI 3HE

- Software-Version:: 6.13.5.1 (no license included)

- Network: 24port 100MB Ethernet with Cisco Router-Kit

- Cell-Controller: V6 Type