1993 AMAT P5000 PECVD tool 3 Chamber

AMAT P5000 PECVD 3 Chamber SiN process, it is complete and has no missing parts. 

- 3 Chamber 150mm

- Process kit, P Chuck

- 3 ENI RF Generators 

- 3 RF Match

- 1 Heat Exchanger

- Electrical Facility Rack

- 1 Mini Controller

- Neslab Chiller

- RF Cable

- 3 Lamp Module and Lamp Driver

- VME SV21 electronic rack, complete with AI/O DI.O Stepper Drivers, etc

- Chopper Drivers

- Unit MFC's