2011 ATV Technologie GmbH PEO-603

Horizontal Furnace

Furnaces/Diffusion Systems

Date of Manufacture: 2011-12-31

Currently Configured for: 200mm

Fab Equipment ID ATV-3 Manufacturer (Make) ATV Model PEO603 Serial Number 159 Install Type:

TTW  OEM MFG Date 2011 Install Date 2011 Is System On-Line? Yes  

Can Produce Wafers As-Is ? Yes  

OEM Audit Available? No

3rd Party Audit Available ? No

Decontamination Report Exists? No

All Cables present ? Yes  

Any Corrosion visible on modules ? No

Any Missing / Damaged Parts ? No

Shipping Brackets Included ? No

Wafer Handler Manual load Quartz boat Handler Type none # of Cassette 1 Backing Pump(s) Edwards QDP40