2002 ATV Technologie GmbH PEO-603

Horizontal Furnace

Furnaces/Diffusion Systems

Date of Manufacture: 2002-12-31

Currently Configured for: 200mm

The ATV is a tube furnace that was used for post metal anneal, doping and anneals under N2 or vacuum up to 500°C.

MAXIMUM SUBSTRATE SIZE 8 inch

Dimensions / Weight (approx. values) 1000 / 710 / 800 270

EQUIPMENT STATUS partially defective currently installed but on idle state. strong smell at higher temperatures; the smell comes from the furnace housing; Possibly defective fan, heater, insulation material or transformer, etc.).