Fusion Semiconductor Systems 200PCUP

UV Cure System

Resist Processing Equipment

Currently Configured for: 200mm

Date of Audit 22 March 2023 Serial Number PP1J483 Original Ship Date from OEM 1999/2000 Is System On-Line? No CE Mark Certified? Yes OEM Audit Available? No Decontamination Report Exists? No Can Produce Wafers AS IS? No Any Known Field Modifications? No All Cables Present? Yes 200 Platform 200 PCUP Number of Cassettes 2 Load Type Standard Install Type Stand-Alone Mini-Environment No Temperature Controller Y Lamp Box Controller Y Heater Block Y System down as Robot parameters all need re-teaching.