2008 Semitool Inc. SST-C-421-280

Batch Wafer Processing

Etch/Clean - Wet Processing

Date of Manufacture: 2008-12-31

Currently Configured for: 200mm

Is System On-Line? Yes CE Mark Certified? Yes OEM Audit Available? No Decontamination Report Exists? No Can Produce Wafers AS IS? Yes  Any Known Field Modifications? No Clean Room Manuals Yes  Number of Tanks 2 Bowl Type Metal Chemicals Used & Tank # AZ 100 remover # of Heaters 3 per tank 25 or 50 wafer load 25 CO2 Fire Suppression System Factory Argon Fire suppression in use, not tool option. Extra note Levitronics Pump installed.