Tokyo Electron Ltd. (TEL) ALPHA-8S ATM OXIDE

Vertical Furnace

Furnaces/Diffusion Systems

Currently Configured for: 200mm

Install Type Through-the-wall Original Ship Date 1997 Software Version V07.06 System Controller TS-4000Z Date of Last PM 2020 (last use) Is System On-Line? Yes CE Mark Certified Yes  SECS/GEM Yes  OEM Audit Available? No Decontamination Report Exists? No Can Produce Wafers AS IS? Yes  Any Known Field Modifications? N All Cables Present? Yes  Alpha-8S Oxide ATM TEL Model Number Alpha8S TEL Process Name Oxide Customer Process Name Oxide Temperature Range 960°C (max. 1025°C) Front Surface Finish White System Layout Type I Process Pressure Atmospheric Number of Zones 5 Temperature Controller Model Model 121 FTP heater No Inner TC Type In-line Rapid Cooling Unit No Boat Rotation Y Tube Seal Lip Seal Remote MMI and Gas Flow Chart Unknown - if yes, not in use Signal Lamp Tower Yes Gas Leak Detection Y Wafer Size 8 inch 26 slots. Wafer Type Notch Bolt-On-SMIF No Integrated SMIF No Stocker 21 slot Carrier N2 Purge System Yes Transfer Stage Wafer Position Sensor Yes Fork Wafer Present Sensor Yes Notch Alignment No (but, if yes, not in use) Fork Wafer Position Sensor Yes