2007 Semitool Inc. Scepter Acid

Batch Wafer Processing

Etch/Clean - Wet Processing

Date of Manufacture: 2007-12-31

Currently Configured for: 200mm

Original Ship Date Jul-07 Software Version SAAI 1.8 Is System On-Line? Yes  CE Mark Certified? Yes  OEM Audit Available? No Decontamination Report Exists? No Can Produce Wafers AS IS? Yes  Any Known Field Modifications? in-line heater exchanger All Cables Present? Yes  Bowl Type teflon 25 or 50 wafer load 50 CO2 Fire Suppression System Yes