2003 Matrix Integrated Systems Bobcat 208

Bobcat 208

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Date of Manufacture: 2003-05-30

Currently Configured for: 200mm

Loading Configuration Open Cassette  Software Version 1.8.7.0.06 Is System On-Line? Yes  CE Mark Certified? Yes  OEM Audit Available? No Decontamination Report Exists? No Can Produce Wafers AS IS? Yes  Any Known Field Modifications? No All Cables Present? Yes  SECS GEM Yes  Source Type Microwave Downstream 1 Matrix 3kw-switchmode Gas Box Configuration Gas Line # Gas Flow (sccm) MFC Mfgr. MFC Model 1 N2H2 mikrosys Intelliflow2 2 CF4 MKS devicenet 3 N2 Mikrosys 4 O2 Mikrosys Included: Pump: one IH1000