Ebara EV-S100N Dry Vacuum Pump NEW

• Ebara EV-S100N
• Dry Vacuum Pump
• SPN: 202249-I51
• Condition: New

Model: EBARA EV-S100 Dry Vacuum Pump

Pumping Speed: 10,000 l/min (600 m³/h)

Ultimate Pressure: 0.5 Pa / 5×10⁻³ mbar

Power at Ultimate Pressure: 0.65 kW

Cooling Water Flow: 2–3 l/min

N₂ Purge Flow: 17–20 Pam³/s

Dimensions (L × W × H): 532 × 260 × 570 mm

Weight: 120 kg

Applications:

• Load Lock
• Transfer
• Etch
• CVD
• Semiconductor - Lithography-Metrology Surface Analysis Physical Vapor Deposition (PVD) Atomic Layer Deposition (ALD) Chemical Vapor Deposition (CVD) Rapid Thermal Processing (RTP) Silicium Technology Ashing Sputtering Ion Implant Diffusion Residual Gas Analysis Epitaxy Load Lock Vacuum Micro Machining (MEMS)
• R&D
• Photovoltaic - ALD
• General Vacuum: Industry Vacuum Drying Coating Leak Detection Systems Machine Tooling Flat Panel Display (FDP) Magnetic Media Medical Engineering
• 
  

Benefits:

• Significantly reduced energy consumption
• Low operation costs
• High profitability
• Very small footprint
• No nitrogen required in clean applications
• Flexible rotation speed and idle mode for additional energy savings