2003 TEL Alpha-8SE

Process: UNDOPED-POLY

INSPECTION DATE 2024-08-21

General Info

1 System Layout Main , Utility

2 System Type L-Type

3 Side Maintenance Installed

4 System Paint Color Ivory

5 Furnace Front Surface Finish SUS

6 Heater Model VOS-40-017

7 Rapid Cooling Unit MISSING

8 N2 Load Lock -

9 O2 Analyzer Installed / LC750

10 Cassette I/O Type (Normal / SMIF) Normal I/O Type

11 SMIF Maker / Model Not Installed

12 AGV Compatibility Unable

13 System Main Controller WAVES

14 Mechanical Controller -

15 Syquenc Controller -

16 Gas Controller -

17 Furnace Temperature Controller -

18 Furnace Overtemp Detector -

19 Host Communications -

20 User Host Computer I/F -

21 Gas Flow Chart Pannel Installed (Front , Rear)

22 Operation Pannel Installed (Front)

23 Signal Tower / Colors Not Installed

24 Gas Detecter Maker / Model RIKEN KEIKI

25 Detecting Gas AsH3

26 Manual (Drawing, Parts list etc) Not Included

Gas system

1 Process Gas N2, SiH4

2 Basic Style Integrated Gas System (Fujikin)

3 Manual Valve Fujikin

4 Air-Operated Valve Fujikin

5 Filter TOSHIBA

6 Regulator VERIFLO

7 MFC Maker / Model UNIT / UFC 1661

8 PT Sensor Maker / Model MKS

9 DPM Maker / Model MKS

10 Check Valve Fujikin

11 Baking System N/A

12 Liquid Source Auto-Refill N/A

13 Burn Controller N/A

14 Veporizer N/A

General Information

VINTAGE

PROCESS

Gas System

TEL Alpha-8SE Vertical LP-CVD Inspection Report

Vacuum/ exhaust system

1 Pump N/A

2 Pressure Control Valve N/A

3 Pressure Controller N/A

4 Pressure Sensor N/A

5 Trap Not Installed

6 Gas Cooler N/A

Wafer/ cassette handling

1 Wafer Type 200 mm Flatzone Type

2 Auto Wafer Aligner Installed

3 Wafer Qty. in Cassette 26

4 Cassette Storage Qty. 21

5 Fork Type 1 + 4

6 Fork-Wafer Presence Sensor Installed

7 Fork-Variable Pitch Installed

8 Magnetic Seal Rotation Installed