2004 TEL Alpha-8SE

Process:D-POLY

INSPECTION DATE 2024. 08. 21

Gas system:

1 Process Gas N2, SiH4, Ph3, ClF3

2 Basic Style Integrated Gas System (Fujikin)

3 Manual Valve Fujikin

4 Air-Operated Valve Fujikin

5 Filter TOSHIBA

6 Regulator VERIFLO

7 MFC Maker / Model UNIT / UFC 1661

8 PT Sensor Maker / Model MKS

9 DPM Maker / Model MKS

10 Check Valve Fujikin

11 Baking System N/A

12 Liquid Source Auto-Refill N/A

13 Burn Controller N/A

14 Veporizer N/A

General info

1 System Layout Main , Utility

2 System Type L-Type

3 Side Maintenance Installed

4 System Paint Color Ivory

5 Furnace Front Surface Finish SUS

6 Heater Model VMM 40-101

7 Rapid Cooling Unit Not Installed

8 N2 Load Lock Installed

9 O2 Analyzer Installed / LC750

10 Cassette I/O Type (Normal / SMIF) Normal I/O Type

11 SMIF Maker / Model Not Installed

12 AGV Compatibility Unable

13 System Main Controller WAVES

14 Mechanical Controller -

15 Syquenc Controller -

16 Gas Controller -

17 Furnace Temperature Controller -

18 Furnace Overtemp Detector -

19 Host Communications -

20 User Host Computer I/F -

21 Gas Flow Chart Pannel Installed (Front , Rear)

22 Operation Pannel Installed (Front)

23 Signal Tower / Colors Not Installed

24 Gas Detecter Maker / Model RIKEN KEIKI

25 Detecting Gas AsH3, Sih4, ClF3

26 Manual (Drawing, Parts list etc) Not Included

Unit: No Contents Configuration Remark

Process kits:

1 Boat Type / Pitch N/A

2 Boat Material N/A

3 Cap Pedestal Material N/A

4 Outer Tube N/A

5 Inner Tube N/A

6 SIC Liner Tube N/A

7 Process Tube N/A

8 External Torch N/A

9 Profile T/C Type N/A

10 ETC

Wafer/ cassette handling:

1 Wafer Type 200 mm Flatzone Type

2 Auto Wafer Aligner Installed

3 Wafer Qty. in Cassette 26

4 Cassette Storage Qty. 21

5 Fork Type 1 + 4

6 Fork-Wafer Presence Sensor Installed

7 Fork-Variable Pitch Installed

8 Magnetic Seal Rotation Installed

Vacuum/ exhaust system:

1 Pump N/A

2 Pressure Control Valve N/A

3 Pressure Controller N/A

4 Pressure Sensor N/A

5 Trap Not Installed

6 Gas Cooler N/A