1995 Fusion Systems Inc. 200 PCU

FUSION 150/7D

Fusion Semiconductor- the system was in production until deinstallation on January 24- quartz parts were removed

Wafer Size Range   Minimum 150 mm  Maximum 200 mm  Set Size 200 mm

Condition Good

Year of Manufacture 1995

Power Requirements 380 V   14.0 A   50 Hz   3 Phase