AMAT Reflexion - Copper
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Description
Copper CMP
CMP Equipment
300mm
Asset HDD not included
· Tool used in copper process
· Factory Interface
o WIP Delivery: OHT
o 4 Position Wide with 2 Loadports
o Loadport Type: Enhanced 25 wafer FOUP
o E99 Carrier ID: HERMOS with RF
o Atmospheric Robot: Kawasaki Single Arm Track Robot
o Light Tower: RYGB Light Tower
· Polisher Unit (Note: Consumables subject to availability)
o Conditioner Head Type: LDF DDF3 on P1, P2, P3
o In Situ Metrology: IScan on P1; Full Scan ISRM on P2, P3
o Polisher Head Type: Profiler 2.1
o Retaining Ring: Grooved TB PPS AEP
o Membrane: Coated Silicon
o 4-Port Upper Pneumatics Assembly
o 3-Pronged wafer chuck
o Input Station Backside Wash
o PRI Wet Robot
o Cleaner: Megasonics/BB1/BB2/ Vapor dryer (Desica cleaner)
o # Scrubbers: 2
o Scrubber Delivery Type: 2 Chem in scrubber 1 and 2
o Hot DI SRD Wash: No
o Inline Metrology: None
o Slurry Delivery System: 3 Slurries/2 Chemicals
o Slurry Dispense Arm: TSDA (tunable slurry dispense arm)
· Factory Hookup / Facilities Information
o 36” Cleaner Workspace
o Cleaner Drain Manifold: 2 Lines
o Electrical: 200/208 VAC; 50/60 Hz; 30mA GFCI
o CE Mark / Compliant
· Automation / Remote Options
o 2 Touchscreen FPD Monitors
o Monitor 1 Location: On Cart
o Monitor 2 Location: At Factory Interface position 3
Specifications
| Manufacturer | AMAT |
| Model | Reflexion - Copper |
| Condition | Used |
| Stock Number | BM5417 |