2011 KLA Puma 9550 i Defect Inspection

KLA Puma 9550 i Defect Inspection, 12"

- 3 Phase

- 5 Wire

- 208 V

- 16 amps

- 50/60 Hz

- 300mm Dual Films Handler w/Integrated Mini Environment DP sensor

- Two Front Interface Mechanical Standard (DFIMS) Load ports Integrated Sub Class 0.1 Mini Environment, Front to Back Configuration

- Modular Inspection Station

- Modular User Interface

- High Res Auto Image grab w/DSA Option

- Advanced Low Noise Detection Algorithms

- Region Based Binning

- Integrated High Magnification Review Optics & Camera with Auto focus - 5 selectable objectives w/Brightfield / Darkfield viewing

- Defect Clustering & Review Sampling

- Low Contact Chuck

- Integrated ULPA Filter

- Data Transfer including Floppy Disk, CD-R and Ethernet

- Wafer Pre-Aligner

- High Resolution Color Display

- KLARF

- Blanket Film Inspection

- Automated Inspection

- Advanced Oblique Illumination Optics

- Region Based Multi-Thresholding

- IRIS spatial filtering technology

- High resolution collection Optics w/improved polarization purity analyzers

- New High Quantum Efficiency imaging sensor technology improving overall defect S/N in low light regions of the device

- New Advanced flexible Image Computer enabling 2.0X increase in data processing rate

- Higher Numerical Aperture (NA) Optics across the entire inspection operating range providing the highest sensitivity while enabling higher throughput modes for optimized CoO

- Five-Line-Scan operating modes & new Optical Imaging Line for increased optical mode flexibility

- Normal Illumination Optics which offers the highest sensitivity for unique (non-oblique) DOI capture

- Advanced RFID Reader

- GEM/SECS Interface

- CE Compliance

2011 Vintage