5 available

300mm

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

PROCESS MODULE,2130,GAMMA,CORE

· MOTOR ASSY, UPLA FILTER, GAMMA 300MM

· ULPA FLTR ASSY,24 X 48 INCH,W 2 PREFLTR

· ASSY,PROCESS CHAMBER

· ASSY,LOAD LOCK LEFT,TOP PURGE

· ASSY,LOADLOCK,RIGHT,TOP PURGE

· KIT,ATM ROBOT,GAMMA 2130

· KIT,34-172011 RELAY,MAIN CNTRLR,G2130,12

· ASSY,CONTROLLER,CHAMBER LIFT,GAMMA 300MM

· KIT,VACUUM PLUMBING PROCESS CHAMBER

· GAS PLMBG KIT, LL VACUUM/FORELINE

· GAS PLMBG KIT,GSBX-CHMBR,PURGE,2130

· KIT,RF GEN,MODEL AX-2000III-A-NV1,G2130

· LPB,5 STA,W/O PUMPS,W/FANS

· ASSY,GUIDE ASSY,LEFT FRONT, CHAMBER LIFT

· ASSY,GUIDE ASSY,LEFT REAR, CHAMBER LIFT,

· ASSY,GUIDE ASSY,RIGHT FRONT, CHAMBER LIF

· ASSY,GUIDE ASSY,RIGHT REAR, CHAMBER LIFT

· ASSY,LIFT ROT SNSR

· ASSY,BEMC 8 AXIS,FW V4.09,G2130

· KIT,PROTEUS,2130

· KIT,S/W,GAMMA(2130) V3.70 B24 (Subject to Change)

FOUP LOADER,G2130

· LOADER,FOUP,SIG STD CONFIG W/HERMOS,6M

REAR DISPLAY,G2130

· ARM,PC SWING, GAMMA 2130

· BRKT,MONITOR SUPPORT PC

· DISPLAY,15 INCH W/TOUCHSCREEN

· ACTR,SWITCH,PUSHBUTTON, EMO

· ADPTR, DUAL MONITOR

BLANK OFF, LIGHT TOWER

GASBOX,02,N2,FG,CF4,GAMMA 2130

· ASSY,ENCLOSURE ASSY,GAS MODULE, 4 GAS,GA

· KIT,OPTIONAL GAS LINE, N2/H2,GAMMA 300MM

· GAMMA 2130 GAS BOX ,4 CHANNEL STD, AERA

· MFC,AERA 781OCD,20SLM O2, 9PD

· MFC,AERA 7800CD,4SLM N2, 9PD

· KIT,OPTIONAL ,GASLINE, CF4

Novellus Systems GAMMA 2130