Therma-Wave Inc. Opti-Probe 7341XP

2 available

300mm

Film Thickness Measurement System

Metrology Equipment

·      CD (1D and 2D features) and Film Stack measurement

·      Prealigner and full alignment using Vision Processing

·      External Server SuperGrendel for fast computation (168 cores)

·      25 wafer load ports (Asyst) with robot transfer (2 paddles)

·      Integrated Mini-Environment

·      Measurement chamber with separated optical table design

·      Pneumatic floating system ensuring no vibration for both stage and optics tables

·      Two User Interface (Front and Rear)

·      CE marking compliance

·      SECS/GEM Full Capability

·      Software: UNT 6.0

·      Autofocus

·      Facilities Requirements: Power Supply (check RP) Compressed Air

N2

Vacuum Exhaust Pedestal

·      Additional Information available upon request