TEL CLEAN TRACK LITHIUS SINGLE BLOCK

2 available

300mm

Single Block (Resist Coater/Developer)

Resist Processing Equipment

·      Utilized with Nikon S208, S308, & S210

·      General:

·      Block 1: Carrier w/ Wafer Transfer Arm

·      Block 2: Process w/ Wafer Transfer Arm

·      Block 3: Stepper Interface Main w/ Wafer Transfer Arm

·      Block 4: Stepper Interface Sub w/ Wafer Transfer Arm

·      Special SCCR Requirement for AC Power Box

·      AC Power Box

o   With Noise filter: CE Mark Type

o   Without Noise filter: Non-EU sites

o   208volt, 3-phase, star, 50/60Hz compatible

·      Carrier Block (CSB)

·      (4) FOUP Loadports

·      Carrier RFID capability

·      CSB Pressure Sensor

·      Process Block

·      Coater (COT) Qty=2

o   (4 or 8) 1.2mm Resist nozzles with Temp control per cup

o   Bevel Rinse nozzle (Ver 2)

o   E-Bath (Nozzle Bath for each COT cup)

o   6ml Tube phram pumps

o   4L or 1L Nowpak bottle insert

o   EBR angle adjustment capability

o   Bulk-FSI system for solvent dispense

o   Exhaust Pressure Control (EPC) per stack

o   Exhaust duct and drain case cleaning function

o   Multi-Rapid Thermo Controller System

o   PP Molded Cups

·      Developer (DEV) Qty=3

o   (1 or 2) NLD Nozzle with Temp control per cup

o   (1) PDR Nozzle per DEV (3 total)

o   Bulk-FSI system for developer dispense

o   Multi-Rapid Thermo Controller System

o   SRN with separate main and sub nozzle

o   PP Molded Cups

o   Pre-plumbing for future FIRM field retrofit nozzle

·      Adhesion Processing Station (ADH) Qty=2

o   Wafer Wedging function using Plate Temperature sensor SW

·      Chill Plate Process Station (CPL) Qty=5

o   Wafer wedging function using optical detection sensor

·      Transfer Chill Plate (CPL) Qty=1

·      Transfer Low Temp Hot Plate (LHP) Qty=2

o   Wafer Wedging function using Plate Temperature sensor SW

·      Precision Chilling Hot Plate Station (CPHG) Qty=6

o   Wafer Wedging function using Plate Temperature sensor SW

·      Interface Block Qty=1

o   IRAS Single Pincette shared wafer transfer with centering guides

o   Buffer Cassette

·      TEL Temp and Humidity Controller Qty=1

o   (1) Shinwa unit for system COT,Dev T/H control

·      Chemical Cabinets Qty=2

o   (1) HMDS Canister

o   (1) 2-Pump Solvent chemical supply system

o   (1 or 2) 3-Pump Developer chemical supply system

o   (2) Sub operation panel

·        (1) AC Power Box