TEL CLEAN TRACK ACT 12 COAT ONLY

3 available

300mm

Coat only Track

Resist Processing Equipment

·      Slam Stand Alone Track

·      2 Wafer Transfer Robot Arms: 1 Carrier, 1 Process

·      3 FOUP Loader Port

·      SECS/GEM I/II Interface required is iUSC

·      2 SOG Coater Process Station

o   2 SOG Nozzles w/ Temperature Control

o   4 Solvent Capability

o   TARC Compatible: Teflon Coated Chamber

o   PTI Mass Flow Exhaust Controller

o   Temperature Humidity Control

o   1 Set of SS Back Rinse and Cup Rinse Nozzles

·      4 Chill Plate Process Station

·      1 Transfer Chill Plate Process Station

·      3 Transfer Low Temperature Hot Plate (LHP)

·      6 High Temp Hot Plate Process Stations (HHP)

·      1 TEL Temperature and Humidity Controller

·      Side Chemical Cabinet

o   8 – 2.5 L Bottle Storage Capacity

o   4 – 2.5 L Bottle Storage Capacity

o   4 – 12 L Tank Solvent Canisters

·      1 AC Power Box

·      Additional details available upon request