2006 TEL CLEAN TRACK LITHIUS i+

• The CLEAN TRACK LITHIUS i+ is a 300-mm/200-mm coater/developer designed for technology nodes 45-nm and beyond.The CLEAN TRACK LITHIUS i+ supports a throughput of 150 wafer per hour and features a thermally isolated design that minimizes thermal interference. It comes standard with the core network solution “Ingenio,” a data analysis platform, and allows for full system integration of measurement and inspection tools. The CLEAN TRACK LITHIUS i+ is specifically developed for immersion technology and is suitable for lithography processes such as ArF immersion, ArF, KrF, and i-line.

• Vintage : 2006/04
• Sold AS-IS where is.
• Supplied with spare parts :

VALVE PCS x 2

ULTRASONIC FLOWLITER x 1

FILTER x 1

MANOMETER x 1

FILTER RESIN x 2

FILTER RESIN x 7

VALVE AMC-VL-X1-DB x 2

DOOR SWITCH x 1

WORKTABLE(N) ASSY x 2

PCB,I/F PRA (interloc) x 1

Fitting J-R-3 syringe nozzle x 8

IFBS IRAI MODELE B x 1

Air operation valve x 2

Motor IRAI Z x 1

Controller IRA_Z x1 

Wafer size configuration 300mm

Chemicals & gasses introduced Resins, HMDS, EC-Solvent, TMA238, nitrogen.

Non-functional module : IRAI 5-0 (driver out of order).

Never been used : module ITC 3-3