TEL Tactras RLSA Poly

5 available

300mm

Multi Block (Resist Coater/Developer)

Resist Processing Equipment

·      Utilized with Nikon S610i

·      General

·      iUSC SECSI, SECSII, HSMS, & GEM Interface Compatibility

·      (5) Blocks Interfaced: Cassette Block, (2) Process Blocks, Scanner Interface (Main and Sub)

·      (5) Wafer Transfer Robot Arms: Cassette, (2) Process, Scanner Interface (Main and Sub)

·      Cassette Block

·      (4) FOUP Loadports

·      RFID capability

·      Pressure sensor

·      Process Block

·      (3) Coater (COT) modules

·           (4) 1.2mm resist nozzles with temperature control per coater

·           4L or 1L Nowpak bottle insert

·           Exhaust pressure controller (EPC) per coater

·      (2) Immersion Top Coater (ITC) modules

·           (2) 1.2mm resist nozzles with temperature control per coater

·      (5) Developer (DEV) modules

·           (2) NLD nozzles with temperature control per developer

·           SRN rev2 nozzle with main and sub nozzles

·           Phase 0 pre-plumbing for future FIRM field retrofit option

·           Pre-plumbing (N2 line only) for future PDR field retrofit option

·      (4) Adhesion (ADH) modules

·      (9) Chill Plate (CPL) modules (optical wafer wedging enabled)

·      (1) Transfer Chill Plate (WCPL) module

·      (5) Transfer Low Temperature Hot Plate (CLHP) modules

·           Pre-plumbed for future CPHG field retrofit option

·           Wafer wedging detection via plate temperature sensors

·      (9) Precision Chilling Hot Plate (CPHG) modules for soft bake or post-exposure bake

·           Wafer wedging detection via plate temperature sensors

·           0.1mm gap pin (type PEEK) proximity pins on chilling arm

·      (1) WEE module (pre-plumbed only)

·      Interface Block

·      IRAS i dual-pincette wafer handling robot

·      (2) Post Immersion Rinse (PIR) modules

·      Buffer cassette; 4-6, 7 for wafer capability

·      (2) Interface Chilling Plates (ICPL)

·      Subcomponents

·      TEL Temperature & Humidity Controller

·      (2) Chemical Cabinets

·      AC Power Box