2007 TEL ALPHA-8SE-Z

Process: SOD

Power on, moving test done

As-is

Basic Configuration of Equipment

Furnace System

This unit comprises mainly the heater and its peripherals.

Gas System

This unit supplies the required or inert gases for the processing.

Automation

This unit loads/unloads the wafer cassettes into/from the furnace unit, transports the

wafers between the  wafer boat and wafer cassettes, insets/withdraws the wafer

boat to/from the process (reactor) tube, and loads/unloads wafer cassettes to/from itself.

Control System

This unit exercises the overall control of the equipment and Supplies electric power

required at the furnace heater and various controllers, etc