1993 NIKON NSR-2005i8A

4 Electric source (without/with) NEMA BOX  /  For (CVCF/UPS)  /  NEMA Switch(none/1/2)

5 Chamber Type Maker ASAHI / SENDAI Production date 1993. 09

S/N 851801 Model S850

6 Chamber Size 1900  Chamber EPROM Ver.

7 SET Temprature Chamber :        ℃       LATC(LLTC):      ℃ IATC:              ℃

Reticle Microscope Fixed  (         )/ Variable (  17.5   mm  to  20   mm )  / setting size (             )

8 Main Software version Computer Type PDP11(73/93) / NEST (    )

9 ROM Version ST- XY- EP-

PA- WF- CE-

WA- LC- RA-

RL-

10 HP LASER 5517A / 5517B / 5517C LSA LASER 5mW / 10mW

11 ITV Camera Nikon Original Type / Nikon New Type / Custom eng. / Other (            )

12 Wafer Size 2inch / 2.5inch / 3inch / 4inch / 6inch / 8inch

13 Wafer Condition Sapphire / Silicon / Other(            )

14 OF Detection Type Nikon Original Type / Omron type / Keyence type

15 Wafer Loader Type Type1 / Type2 (A1 / A3)

16 Wafer Carrier Table Left / Right / Extra In-line no / yes (right/left)

17 Reticle Size 5inch(32mm / 26mm / 18mm) /6inch FIA no / yes

18 Reticle Library Slot Main : (    23    ) slot / Ext. LIB (   16    ) slot

19 PPD /PD/ Extension LIB PPD ( no/yes )         PD( no/yes )      Extension LIB( no/yes )

20 Rack Type Normal (Right / Left)  /  Special

21 NOTE Wafer Stage 8-6"