2006 NIKON NSR 2005 i 12 D i-Line Stepper

Nikon NSR 2005 i 12 D i-Line Stepper - See link below (A# 137375)

- Version: 150 mm

- Resolution: 0.35μm or less (High resolution, positive resist film of 1.0μm thickness )

Focus Calibration Repeatability:

- Within 100 nm ((3σ) )

- 20 measurements

Lens Distortion (Including Magnification Error):

- Within ± 40 nm 37 points / chip

Magnification Control:

- Within ± 15 nm

- Measurement of Initial Heat: 180 min

- Measurement of Initial Cool: 240 min

Maximum Exposure Area:

- Within 31.11 mm dia.

- 22.0 mm x 22.0 mm to 17.96 mm x 25.2 mm (hor.) X (vert.)

Reticle Blind Setting Accuracy: + 0.4 to + 0.8 mm (on reticle)

Exposure Power:

- 800 mW / cm2 or more

- Measured after installed

Integrated Exposure Stability (including integrated exposure matching):

- Within ± 1.0% (50 mJ / cm2 or more)

- Within ± 0.5% (at 100 mJ / cm2)

Illumination Uniformity:

- Within ± 1.0%

- Inside exposure area 5 measurements

2006 Vintage