Novellus C1
Novellus C1
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Description
Main Body
Remote AC
Sigma6
EGSS
△−Y Trans
＜Gas Configuration＞
N2, SiH4, N2O, C2F6,O2, NH3, TEOS
< Chamber Configuration >
PE-CVD CCP/SiO (TEOS), SiN
< Software Version >
4.431
< Pumps >
Ebara/40X20OERD5M-NJ
Ebara/150X40UERP6M-U
< RF Power >
AE/RFG5500
ENI/PL-2HF-11451-54
Specifications
| Manufacturer | Novellus |
| Model | C1 |
| Condition | Used |
| Stock Number | BM5532 |