2002 Axcelis/ Eaton NV8250HT

Type:NV8250HTEnergy Config:0 - 250Kv MidcurrentSerialnumber:908Build Year:2002

Date of first usage:buyed new from vendor

Current Condition: Good

CE-Conformity:Yes

Voltage:208V

Cryo-Pumps:3x CTI/Edwards Onboard: OB-8

Cryo-Kompressor:CTI 9650 Low-Voltage

Turbo-Pumps:Seiko/Edwards: STP1003C, STP-301C, STP-1003C

Rough-Pumps:Edwards: without QDP40, not included

Endstation Rough-Pump:not included

Wafersize:8inch(200mm)

Clamp-Type:E-Chuck green with Non-µC Controller

Wafer-Cooling:Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear)

Gasbox:Modular 5-String, 4x 2,0L Size

String1:Argon Carriergas; MFC Unit-1662 2sccm BF3

String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3

String3:condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3

String4:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3

String5:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3

Beam-Profiler Type:Belt-Drive

Gear-Type's:Scan: Planetary Tilt: Planetary

Source-Type:ELS4 IHC-Source without Vaporizer

HV-Transformer:Silicon-Oil

Light-Tower:red/yellow/green; no buzzer

Main-WorkstationSolaris SUN AXI 3HE (Special case)

Second-WorkstationSolaris SUN Sparc5

Software-Version:5.1.4.1

Network:24port 100MB Ethernet with Cisco Router-Kit

Cell-Controller:177 Type

Notes:Upper-Rack Panel missing 

Clean-Room Table missing on frontside 

all 4 wheels on oil-isolation transformer are broken 

Minor modifications on tool 

No Manual-Set/ no Spares include

tool was used 24/7 full in production between 15

and 230kv Energy 

If required, tool can be inspected on site, but no

Power

Description MidCurrent Implanter

Condition Good

Year of Manufacture 2002

Power Requirements 208 V

CE Marked YES