• 6-8” wafer size (150MM)

* Resistivity mapping system

* With flat finder

* H type loader

* Refurbished, Complete tested and Calibration checked.

KLA-Tencor RS-75 Resistivity Mapping System

Specifications:

• Analyze sheet resistance data, on various conductive layers such as implants, diffusion, epi, CVD,

metals, and bulk substrates

• Provides accurate and repeatable sheet resistance measurements, from 5 m ohm/sq to 5M

ohm/sq on 2-inch to 8-inch wafers, by uniting sophisticated modeling algorithms, advanced

analysis techniques, and precision electronics.

• Optional 100mm - 200mm Open Cassette

• Cassette to cassette handling

• Measurement Range: 5mΩ/sq - 5MΩ/sq

• Repeatability (VLSI): < 0.2% (1σ)

• Accuracy (VLSI): ±1%

• Edge Exclusion: 3mm from edge of film

• Alignment System: Notch/Flat aligner on Probe Arm

• Computer OS: DOS Software: Rev 6.22

• Computer Configuration: 486/66MHz CPU 300MB HDD or better

KLA RS75/TCA