2000 AMAT Centura EPI 8 inch

The system was completely overhauled by us with external service AMAT on site at that time!; Blower controls upgraded every 3 chambers; Approximately 4 years ago the Complete Gas Cabinet was upgraded from Legaty to Universal Gas Cabinet on site with the FA. AMAT upgraded costs €0.5 million; The facility has proprietary Modorized Lift 3x;

Wafer Size Range   Minimum 200 mm  Maximum 200 mm  Set Size 200 mm

Number of Chambers 3

Chamber 1 Description White Body Cassettes; 1xprocess chamber Std. EPI; 2x poly chambers; vita controller; 3xModorized Rotation/Lift Infineon homemade; new upgraded blower controls;

Chamber 2 Description White Body Cassettes; 1xprocess chamber Std. EPI; 2x poly chambers; vita controller; 3xModorized Rotation/Lift Infineon homemade; new upgraded blower controls;

Chamber 3 Description White Body Cassettes; 1xprocess chamber Std. EPI; 2x poly chambers; vita controller; 3xModorized Rotation/Lift Infineon homemade; new upgraded blower controls; 

Power Requirements 480 V   300.0 A   3 Phase

Year of Manufacture 2000

Condition Excellent