1999 NIKON NSR-S203B

As-is condition

Tool Status Connected

Wafer Size 200 mm

Fab Section Lithography

Asset Description Nikon NSR-S203B Lithography

Scanner 248nm

Software Version MCSV

CIM SECS

Process Scanner

Handler System WL Type 3 1

Factory Interface Open Cassette 1

Main System NSR-S203B 1

U76V ( warm idled 3Q 2022)

IU Flare = 1.80%

Lens Flare = 5.70%

Uniformity = 6.10%

Power = 442 mW/cm2

Total Focus Deviation = 0.154 µm

Astigmatism = 0.084 µm

Coma = 0.080 µm

Iso DOF = .241 µm