KLA-Tencor Corp. KLA 5200XP

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Description

Overlay Measurement System

Metrology Equipment

Currently Configured for: 200mm

Overlay & Registration

KLA 5200XP User Interface

Software Version: 14.70.01

Robot Type: N/A

Handler: x2 Open Cassette




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Specifications

ManufacturerKLA-Tencor Corp.
ModelKLA 5200XP
ConditionUsed
Stock NumberBM5582