KLA-Tencor Corp. KLA 5200XP
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Description
Overlay Measurement System
Metrology Equipment
Currently Configured for: 200mm
Overlay & Registration
KLA 5200XP User Interface
Software Version: 14.70.01
Robot Type: N/A
Handler: x2 Open Cassette
Specifications
| Manufacturer | KLA-Tencor Corp. |
| Model | KLA 5200XP |
| Condition | Used |
| Stock Number | BM5582 |