KLA-Tencor Corp. KLA 5200XP

Contact us for price

or
Call +353 (0) 87 192 1110

Description

Overlay Measurement System

Metrology Equipment

Currently Configured for: 200mm

Overlay & Registration

KLA 5200XP User Interface

Software Version: 14.60.02

Robot Type: KLA Internal

Handler: x2 Open Cassette

Show All

Specifications

ManufacturerKLA-Tencor Corp.
ModelKLA 5200XP
ConditionUsed
Stock NumberBM5583