AMAT Endura Parts List

8"

SEI Board

AE LF10A 400Khz RF Gen 

VHP Robot Controller Module 

AO Board (DAC703KH 미포함)

VHP Robot Assy (Except Cover)

- 0190-44340 VHP Motor (OEM New)

Turbo Pump TMP361C 

Leybold NT151/361 

(Contector 포함)

Cryo Pump OB-8F 

3Phase Enhanced

MDX-L12M (SN 152599) Modify

Ion Gauge Power Supply 

(MKS 332102)

Nude Ion Gauge Cable 75ft

CTI 9600 Compressor

Comdel CPS-1001S RF Gen

Gate Valve(12140-PA24)

CTI Network Terminal 

RF Resonator Assy PCII

627B.1TBE1B Baratron Gauge

 0.1 Torr

Nude Ion Gauge (MKS 274043)

Convectron Gauge (MKS 275185)

8" E-5500HP (As is , SN : #3551)

Narrow Body Loadlock A,B

Ch#E,F Orient / Degas STD

Buffer HP+

X-fer HP+

Ch#C PCII

CPS1001S / LF10A / TMP361C Turbo

Gen Rack 1St

Main AC Long Type 

CTI9600 Compressor x 1

Neslab III x 1