Seidel E5WKS-M310/22-PB Servo Drive Module – 3×220V, 22A, from Suss Microtec Falcon Developer

Used Seidel E5WKS-M310/22-PB servo amplifier module, removed from a 1996 Suss Microtec Falcon polyimide developer. This unit is designed for precision motion control of 6–12 pole motors, commonly used for wafer spin chucks and robotic handling systems. The drive is rated for high reliability industrial operation and includes integrated power electronics, logic control, and LED diagnostics. Manufactured in Germany by Seidel Antriebs-Systeme (Düsseldorf).

• OEM: Seidel Antriebs-Systeme / Jutronik Seidel
• Model: E5WKS-M310/22-PB
• PCB ID: 65PC/8906-03
• Power: 3 × 220 V AC, 5.9 kVA
• Nominal current: 22 A
• Effective current (4Q): 22 A
• Option: 6–12 pole motor compatibility
• Status: Used, pulled from working tool, not refurbished
• Application: Wafer spin chuck drive / robotic axis drive in semiconductor developer tools

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