We have two units of Brooks fixload 6M, which are still installed with August 3Di-8000 AOI system...

AGA-27C-V RF Power Generator. AGA-27C-V / 3D80-000825-V3 / 60Hz / 2700W / Daihen

MKS INSTRUMENTS 253B-26373 Exhaust Throttle Valve with Heater Jacket (rbd2.1b1) used

SWAGELOK PGU-50-P60-L-4FSF GAUGE (rbd2.1b5) used

WASCO SP128-51W2B-X W/ SS-4P4V + FITTINGS (rbd2.1b5) used

VERIFLO 45700207 316L Diaphragm Valve W/ FITTINGS (rbd2.1b5) used

VERIFLO 45700048 Diaphragm Valve (rbd2.1b5) used

CKD PGM-50-5-S-B GAS REGULATOR (rbd2.1b5) used

VERIFLO 930 316L Diaphragm Valve (rbd2.1b5) used

HONEYWELL MIDAS-L-O2S Oxygen O2 Sensor Cartridge (rbd2.1b5) used

SWAGELOK SS-BNV51-0 W/ R07-100-RGAA PLUS FITTINGS (rbd2.1b5) used

AERA 0190-34212 MASS FLOW CONTROLLER (rbd2.1b5) used