1996 AMAT E220

Tool Status Connected

Wafer Size 200 mm

Fab Section Implant

Asset Description Medium current ion implantation system, single wafer

Software Version NA

CIM SECS, GEM

Process Medium current implant

Main System Computer 1

Main System Accel column 1

Main System Beamline power distribution 1

Main System Source power distribution 1

Handler System Aligner 2

Handler System Robot 2

Others

Factory Interface NONE 1

Options System

Main System Main power distribution 1

Touch screen 1

Traveling faraday 1

Scan motor 1

Lens PS 1

Reducer 1

Uniformity controller 1

Scan plate 1