1992 AMAT E220

Tool Status Connected

Wafer Size 200 mm

Fab Section Implant

Vintage 1992

Asset Description Medium current ion implantation system, single wafer

Software Version NA

CIM SECS, GEM

Process Medium current implant

Main System Source PD 1

Main System Computer 1

Main System Power distribution 1

Handler System Robot 2

Handler System Aligner 2

Others

Main System Accel column 1

Factory Interface NONE 1

Options System

Main System Beamline PD 1

Main computer 1

Source filament cables 1

Quad 1 PS 1

Accel PS 1

Accel resistor string 1

Quad 2 PS 1

Orienter controller 1

Endstation vacuum gauge controller 1

Roplat 1

Scan generator PS 1

Reducer 1

Main PD breaker 1

Computer screen 1

Scan motor 1

Vaporizer PS 1