Thermo Neslab/AMAT 620000000015 Thermal Fluid Heat Exchanger

Thermo Neslab Steelhead 0 AMAT Thermal Fluid Recirculating Heat Exchanger

This unit is guaranteed to work. I will need about 3 weeks to have it fully tested and any repairs made if necessary.

Sold in Good working condition

The Unit's Serial Number Tag Reads:

Model: STEELHEAD 0

BOM Number: 620000000015

Power Requirements: 200-208 VAC, 3-Phase, 50/60 Hz, 23/25 A

Heater Capacity: 6 kW @ 208 VAC

Pump Capacity: 3 HP Weight: 385 lbs. (174 kg)

CE Marked: Yes

Typical Semiconductor Applications:

Dry etch - plasma (e.g. RF/Microwave)

Wet etch

Dry deposition (e.g. CVD, SACVD, PVD)

Wet deposition (e.g. ECP)

Ion implantation

Plasma asher

Planarization

Components:

Chamber walls

Cathodes

Domes

Upper/lower electrodes

Chucks/disks

Ozone generators

Cleaning baths and plating tanks

RF power supplies

Reliable Performance:

Proven quality

Extended DI life

Next Generation AMAT 0

Description:

The heat exchange system consists of a thermal fluid recirculating system which provides a constant fluid flow. A second loop consists of a facilities water loop which recirculates through a plate heat exchanger for fluid cooling. A 6 kilowatt heater is located in the fluid recirculating system.

Specifications:

Temperature Range: +30°C to 85°C (+86°F to +125°F)

Cooling Capacity: 8 kW @ 5 GPM

Number of Channels: 4 (2 GPM per channel)

Materials: Brass, copper, stainless

Pump Performance @ 60 Hz: 30 LPM @ 5.5 bar (8 GPM @ 80 psi)

Compliance: CE, IBM Safety standards including EMO

Reservoir Volume: 5 gallon (19 liter)

Unit Dimensions: 30.25" H x 20.25" W x 29.25" D (76.8 cm x 51.4 cm x 74.3 cm)

Power Requirements:

50 Hz: 200/208 VAC, 3-Phase, 23 A

60 Hz: 200/208 VAC, 3-Phase, 25 A

Plumbing Connections:

Inlet/Outlet: 1/2" Quick disconnects

Drain: 1/2" Female NPT

Unit Weight: 166 lbs (365 kg) (I think this is reversed as the tag says the opposite)

Serial Communications: Analog, Digital