2000 Hitachi S-9220

Running in the cleanroom.

Working Condition.

It’s complete with HDD and Software included.

Wafer : 200 mm.

Vintage : 2000.

Main system: main tool- 1

Options system: optic system

Factory interface: SMIF- 2

Handler system: robot system- 1

*List above may or may not be comprehensive. Tool is sold in "as-is" condition