2012 AMAT 3 DXZ CXZ Chambers for Centura P5000

3 DXZ/CXZ Chambers for Centura/P5000

Mainframe is transport rack

Wafer Size Range   Minimum 150 mm  Maximum 200 mm  Set Size 200 mm

Number of Chambers 3

Process Capabilities Silan

Chamber 1 Description used ceramic heater; RF match

Chamber 2 Description used ceramic heater; RF match

Chamber 3 Description used ceramic heater; RF match

Year of Manufacture 2012

Condition Good